Skip to content Skip to main menu Skip to main menu

Industrial Solution Industrial Solution

CS Series

Features

Capacitive Displacement Sensor
- The most effective way to measure displacement without contact
- Nano-meter level measurement accuracy
- Various application available through sensors of distance ranges

Description

* Measuring Principle



 

- Using the ideal principle of plate capacitor 

- A constant alternating current flows between sensing area and target, and the capacitance is measured inversely proportional to the distance.

- To secure linearity, a guard electrode is used outside the center electrode.

- The measuring magnetic field was made homogeneous by equalizing the potentials of the guard and the center electrode.                  


Item

Shape

Mechanical

Sensing Area

Resolution

Measurement Ranges

Operating Temp

CS-3

 

 

1.6mm

±0.01%

5~15um

-20 ~ 100°C

CS-5

 

2.8mm

±0.01%

15~50um

-20 ~ 100°C

CS-8

 

 

5mm

±0.01%

50~150um

-20 ~ 100°C

CS-14

 

 

8mm

±0.01%

130~400um

-20 ~ 100°C

 


Specifications

Parameter

Capacitive Sensors

Model

CS-3

CS-5

CS-8

CS-14

Active diameter

1.6 mm

2.8 mm

5 mm

8 mm

Sensor diameter

3.0 mm

5.0 mm

8.0 mm

14.0 mm

Resolution

± 0.01%

± 0.01%

± 0.01%

± 0.01%

Nominal measuring
Range

5~15um

15~50um

50~150um

130~400um

Linearity

± 0.5%

± 0.5%

± 0.5%

± 0.5%

Sensor Active area

2.0 mm2

6.2 mm2

19.6 mm2

50.2 mm2

Operating
Temperature

 -20 ~ 100 °C

 -20 ~ 100 °C

 -20 ~ 100 °C

 -20 ~ 100 °C

Material

Stainless steel

Stainless steel

Stainless steel

Stainless steel

Model Finder

※ Double check possible

Download

Go to top